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- Telephone
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541-317-1020
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- FAX
- 541-317-8329
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sales@miller-design.com
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MDE 2008 shown with Navitar single tube microscope
For a 3D interactive drawing of our probe station click
here
Right click the drawing and choose view, then rotate, to view all angles of the
probe station.
The Miller Design and Equipment
Model 2008 Probe Station
After 35 years of working on other manufactures’ probe
stations, we have decided to build our own. As we have worked on almost every
brand out there, such as Micromanipulator, Signatone, and Rucker and Kolls; we
have a fair idea of what works, and what doesn’t. We have designed the MDE 2008
with these things in mind. We’ve incorporated ideas from the best machines and
eliminated the weaknesses. The MDE 2008 is simple, well-built, easily
maintained, upgradeable, and easy-to-use. Our probe station has no belts to wear
out or break, no fancy vacuum system to fail, no hidden screws or bolts that you
need to be a contortionist to get to, and no over-engineered and under-built
platen mechanisms to fight.
 
Pull Out Load Position Right Slide View
Optional Microscope Movement Micrometer Head
Adjust
(click any of the above for a larger
picture)
The MDE 2008 is a compact probe station ideal for R & D,
failure analysis, RF probing, biological and medical research probing. The
latching pullout stage is cable and lead screw driven with 8” of travel, even on
our 6” machines. This allows for future upgrade to larger wafers by simply
changing the chuck, rather than purchasing an entirely new machine. The platen
lift mechanism is a chain driven eccentric that will not wear out or break. The
2” diameter micrometer platen height adjustment is easy to read and use. The
all aluminum base is compact and sturdy without being unnecessarily heavy. The
stainless steel platen posts with large linear bearings will not stick or wear
out. The MDE 2008 is simply an affordable well engineered probe station built
by people who have made their living off repairing, refurbishing, and adjusting
probe stations for a long, long, time.
FEATURES &
SPECIFICATIONS:
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Primarily constructed of black anodized aluminum
and stainless steel for rugged dependability.
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Compact size and small footprint.
Height = 17" Depth = 19" Width = 20"
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Manual stage provides a full 8" of travel for
both X and Y axis and 90 degrees of rotation.
Mechanical drive ratios: Y-Axis = 19.8:1 X-Axis = 3.25:1 Rotation =
1:1
Planarization: Adjustable to better than 0.0005" over chuck surface
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Vacuum actuated chuck, gold plated , stainless
steel or custom design
Flatness: +/- 0.0001"
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Pull-out stage provides easy and clear access for
loading/unloading wafers.
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Eccentric-drive lift mechanism provides 1/4" of
travel with smooth, no-bounce probe contact. Repeatability: +/-0.0001"
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Micrometer adjustable over travel for control of
probe compression.
Graduations: 0.0001" Accuracy: 0.0001"
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Unique 3-point clamps allow for rotational
alignment of probe array and quick change of rings.
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Leveling pads allow for secure and level
adjustment to mounting surface.
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Optional air shock anti-vibration mounting for
high magnification applications.
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Optional fine theta adjust provides high
resolution for rotational alignment.
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Optional X-Y microscope movement.
X Travel = +/- 1" (2" Total) Y Travel +/- 1" (2" Total)
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Optional MDE focus block
can be configured for mounting optical or video microscopes.
Mechanical drive ratio of 280:1 eliminates the need for separate
coarse and fine focus.
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