Karl Suss Micropositioners
The Suss MFI is a sub-micron Probe Head that utilizes a micro-machined cantilever to perform sub-micron imaging and to make direct electrical contact with the circuit node. The system consists of a control, application software and one Probe Head.
MFI Positioner
Specifications:
- Image Resolution 50nm
- Area Image 38um x 38um
- Placement Accuracy 90nm
PH150 Positioner
Specifications:
- Travel Range X, Y 10 mm
- Travel Range Z 8 mm
- Z Coarse Adjustment Range ± 7.5 mm
- Screw Resolution X,Y,Z 250/500 μm/rev 50/100 TPI
- Feature Resolution 0.5 μm
Karl Suss PH150 Micropositioner Brochure
Specifications:
- X, Y, Z travel 8mm
- 3 um resolution
- Adjustable faceplate
- Variable positioning of arm on faceplate
PH120 Positioner
Karl Suss PH120 Micropositioner Brochure
PH400 Positioner
Specifications:
- X, Y travel 10mm
- Z travel 8mm
- Resolution 0.2 um
